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【Hot attention of Chemical Machinery Equipment Network ] MEMS system is micro-electromechanical system, which can be produced in batches and integrates miniatureSensors , actuators, mechanical structures, power sources, signal processing, control circuits, high-performance electronic integrated devices, interfaces, and communications are all micron or nano-level devices or systems.
Hot attention of Chemical Machinery Equipment NetworkChemical machinery and equipmentsensorMEMS sensor is a multidisciplinary cutting-edge research field developed on the basis of microelectronics technology.
It uses microelectronics and micromachining technology to manufacture new sensors.
Compared with traditional sensors, it has the characteristics of small size, light weight, low cost, low power consumption, high reliability, suitable for mass production, easy integration and realization of intelligence.
It uses microelectronics and micromachining technology to manufacture new sensors.
Compared with traditional sensors, it has the characteristics of small size, light weight, low cost, low power consumption, high reliability, suitable for mass production, easy integration and realization of intelligence.
At the same time, the feature size on the order of micrometers allows it to perform functions that cannot be achieved by some traditional mechanical sensors.
Since 2016, the domestic sensor technology and industry have developed rapidly.
At the same time, driven by the domestic Internet of Things, 5G, artificial intelligence and other technologies, sensors have continued to develop in the direction of MEMS, intelligence, networking, and systemization.
Since 2016, the domestic sensor technology and industry have developed rapidly.
At the same time, driven by the domestic Internet of Things, 5G, artificial intelligence and other technologies, sensors have continued to develop in the direction of MEMS, intelligence, networking, and systemization.
The MEMS industry chain mainly involves four major links: design and development, manufacturing, packaging and testing, and system application.
The upstream of the MEMS industry chain includes the design of MEMS devices, the research and development and supply of materials and production equipment, the midstream includes the manufacturing, processing, packaging and testing of MEMS devices, and the downstream use of MEMS products to integrate terminal electronics.
According to statistics, MEMS & sensor foundry production capacity will increase from 3.
9 million pieces/month in 2019 to 4.
7 million pieces/month in 2023.
The upstream of the MEMS industry chain includes the design of MEMS devices, the research and development and supply of materials and production equipment, the midstream includes the manufacturing, processing, packaging and testing of MEMS devices, and the downstream use of MEMS products to integrate terminal electronics.
According to statistics, MEMS & sensor foundry production capacity will increase from 3.
9 million pieces/month in 2019 to 4.
7 million pieces/month in 2023.
Development Trend of China's MEMS Sensor Industry
1.
Miniaturization.
In the future, equipment miniaturization and low energy consumption will continue to reduce product size and product cost is one of the important development trends of the MEMS sensor industry.
Miniaturization.
In the future, equipment miniaturization and low energy consumption will continue to reduce product size and product cost is one of the important development trends of the MEMS sensor industry.
The downstream applications of MEMS sensor products have higher requirements for thinner and lighter products.
On the one hand, MEMS manufacturers improve the package structure meter and reduce the device size on the basis of ensuring product performance.
On the other hand, they also simultaneously reduce the size of the chip.
When the size of a single wafer is fixed, the reduction of the chip size increases the chip size.
The output also effectively reduces the average cost.
In the future, as the size of MEMS shrinks, MEMS (Micro Electro Mechanical System) will gradually transform to NEMS (Nano Electro Mechanical System), and will achieve continuous reduction in size and cost.
On the one hand, MEMS manufacturers improve the package structure meter and reduce the device size on the basis of ensuring product performance.
On the other hand, they also simultaneously reduce the size of the chip.
When the size of a single wafer is fixed, the reduction of the chip size increases the chip size.
The output also effectively reduces the average cost.
In the future, as the size of MEMS shrinks, MEMS (Micro Electro Mechanical System) will gradually transform to NEMS (Nano Electro Mechanical System), and will achieve continuous reduction in size and cost.
2.
Integration.
Multi-sensor fusion and collaboration The number of sensors carried in a single device has gradually increased.
At the same time, in order to improve the effect of signal recognition and collection and the integration of devices, sensors have begun to achieve fusion and collaboration (such as accelerometers, gyroscopes, magnetometers) , IMU combination forms an inertial sensor group).
Integration.
Multi-sensor fusion and collaboration The number of sensors carried in a single device has gradually increased.
At the same time, in order to improve the effect of signal recognition and collection and the integration of devices, sensors have begun to achieve fusion and collaboration (such as accelerometers, gyroscopes, magnetometers) , IMU combination forms an inertial sensor group).
Diversified application scenarios
With the development of artificial intelligence and Internet of Things technology, the application scenarios of MEMS sensors will become more diverse.
MEMS sensors are one of the important underlying hardware of artificial intelligence.
The richer and more accurate the data collected by the sensors, the more complete the functions of artificial intelligence.
MEMS sensors are one of the important underlying hardware of artificial intelligence.
The richer and more accurate the data collected by the sensors, the more complete the functions of artificial intelligence.
1.
Used in medical treatment
Used in medical treatment
MEMS sensors are used in * fetal heart rate detection.
It is a very technical task to detect fetal heart rate.
Because the fetal heart rate is very fast, between 120 and 160 beats per minute, a traditional stethoscope or even an ultrasound Doppler with only amplification is used.
It is difficult to measure accurately with manual counting.
The ultrasound Doppler fetal heart rate monitor with digital display function is expensive and is only used in a few large hospitals, and cannot be popularized in small and medium-sized hospitals and large rural areas.
In addition, ultrasonic vibration waves act on the fetus, which will have a great adverse effect on the fetus.
Although the detection dose is very low, it also belongs to the category of destructive detection and is not suitable for frequent and repetitive inspections and household use.
It is a very technical task to detect fetal heart rate.
Because the fetal heart rate is very fast, between 120 and 160 beats per minute, a traditional stethoscope or even an ultrasound Doppler with only amplification is used.
It is difficult to measure accurately with manual counting.
The ultrasound Doppler fetal heart rate monitor with digital display function is expensive and is only used in a few large hospitals, and cannot be popularized in small and medium-sized hospitals and large rural areas.
In addition, ultrasonic vibration waves act on the fetus, which will have a great adverse effect on the fetus.
Although the detection dose is very low, it also belongs to the category of destructive detection and is not suitable for frequent and repetitive inspections and household use.
Fetal heart rate based on MEMS acceleration sensor designAfter proper improvement, the detector can use this as a terminal to make a remote fetal heart rate monitoring system.
The *signal acquisition and analysis monitoring host at the hospital will give an automatic analysis result, and the doctor will diagnose the result.
If there is any problem, the pregnant woman will be notified to the hospital in time.
This technology is conducive to pregnant women to check the condition of the fetus at any time, and is conducive to the health of the fetus and pregnant women.
DetectorThe *signal acquisition and analysis monitoring host at the hospital will give an automatic analysis result, and the doctor will diagnose the result.
If there is any problem, the pregnant woman will be notified to the hospital in time.
This technology is conducive to pregnant women to check the condition of the fetus at any time, and is conducive to the health of the fetus and pregnant women.
2.
Application in automotive electronics
Application in automotive electronics
MEMS pressure sensors are mainly used to measure air bag pressure, fuel pressure, engine oil pressure, intake pipe pressure and tire pressure.
This sensor uses monocrystalline silicon as a material, and uses MEMS technology to make a force-sensitive diaphragm in the middle of the material, and then diffuse impurities on the diaphragm to form four strain resistors.
MEMS pressure sensors for vehicles have several common forms such as capacitive, piezoresistive, differential transformer, and surface acoustic wave.
The principle of MEMS accelerometers is based on Newton’s classical laws of mechanics.
It usually consists of a suspension system and a detection mass.
The acceleration is detected by the offset of the micro-silicon mass block.
It is mainly used for automobile airbag systems, anti-skid systems, and car navigation.
In addition to capacitive and piezoresistive systems and anti-theft systems, MEMS accelerometers also have piezoelectric, tunnel current, resonance, and thermocouple types.
This sensor uses monocrystalline silicon as a material, and uses MEMS technology to make a force-sensitive diaphragm in the middle of the material, and then diffuse impurities on the diaphragm to form four strain resistors.
MEMS pressure sensors for vehicles have several common forms such as capacitive, piezoresistive, differential transformer, and surface acoustic wave.
The principle of MEMS accelerometers is based on Newton’s classical laws of mechanics.
It usually consists of a suspension system and a detection mass.
The acceleration is detected by the offset of the micro-silicon mass block.
It is mainly used for automobile airbag systems, anti-skid systems, and car navigation.
In addition to capacitive and piezoresistive systems and anti-theft systems, MEMS accelerometers also have piezoelectric, tunnel current, resonance, and thermocouple types.
3.
Applied to sports tracking system
Applied to sports tracking system
In the daily training of athletes, MEMS sensors can be used to measure 3D human movements, record every movement, and coaches analyze the results and compare them repeatedly in order to improve athletes' performance.
With the further development of MEMS technology, the price of MEMS sensors will also decrease, which can also be widely used in public gyms.
With the further development of MEMS technology, the price of MEMS sensors will also decrease, which can also be widely used in public gyms.
In terms of skiing, the pressure sensor, acceleration sensor, gyroscope, and GPS in 3D motion tracking allow users to obtain extremely accurate observation capabilities.
In addition to providing snowboard movement data, it can also record the user's location and distance.
The same is true for surfing.
The 3D motion tracking installed on the surfboard can record information such as wave height, speed, surfing time, paddleboard distance, water temperature and calories consumed.
In addition to providing snowboard movement data, it can also record the user's location and distance.
The same is true for surfing.
The 3D motion tracking installed on the surfboard can record information such as wave height, speed, surfing time, paddleboard distance, water temperature and calories consumed.
In the future, new industrial fields such as smart home, industrial Internet, Internet of Vehicles, and smart cities will bring a broad market space for the MEMS sensor industry.
Source: Leqing Think Tank, Encyclopedia
Original title: MEMS sensor industry chain is gradually expanding and expanding the application field in the future
