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Issue 11/2014 - EDWARDS showcases leading vacuum equipment and exhaust gas treatment systems

 Last Update: 2022-11-12
 Source: Internet
 Author: User

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EDWARDS showcases leading vacuum equipment and exhaust gas treatment systems

Edwards, the world's leading manufacturer of vacuum equipment and exhaust gas treatment systems and corresponding value-added service provider, showcased a range of high-performance vacuum pumps and exhaust gas treatment technologies at the SEMICON China exhibition held at Shanghai New International Expo Center on March 18~20, including the recently launched STP-iXA4506 large-capacity turbomolecular pump (TMP).
Other products on display include the iH600, iXM1200/1800, STP iXA3306 and iXH645H: The STP-iXA4506's high speed (4300 l/s N2) and high displacement (up to 4300 sccm N2) combined with its ability to efficiently suction light and heavy gases make it ideal for a wide range of high-volume, high-flow applications including semiconductor etching, LCD etching, glass coating, Solar physical vapor deposition (PVD) and PVD coating
.

Edwards' vacuum and exhaust gas treatment technologies are committed to reducing pollution, energy consumption and operating costs throughout semiconductor manufacturing, including LEDs, solar PV and flat-panel displays (FPDs
).
(Liu Xinguang)

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