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According to the "Satellite" news agency, scientists from the Russian Nuclear Research University (Moscow Institute of Engineering Physics-NRNUMEPhI) stated in an article published in the "Surface and Coating Technology" magazine that they have developed a method that can be used in the steam of molten materials.
A plasma generator that generates a strong current pulse magnetron discharge
.
With this new technology, the thin film needed in the high-tech field can be sprayed faster, and the high-quality level can be maintained
.
Magnetron sputtering is the only method to deposit building glass (with various colors) that uses energy-saving coating materials
.
Magnetrons can spray hard coatings that can significantly improve performance onto cutting tools, such as using titanium nitride instead of gold to coat the domes of churches
.
In microelectronics, this method is used for the metallization of integrated circuit boards; in optics, it can be used to produce filters; it can also be used to produce hydrophobic coatings
.
The plasma generator equipment developed by the scientists of the Moscow Institute of Engineering Physics consists of a plasma connector and a power supply.
It works in a special magnetron discharge mode.
In these modes, together with sputtering, it exerts the strong vapor effect of the molten material.
Form paint
.
Alexander Dumarkin, a scientific researcher in the Plasma Physics Department of the Moscow Institute of Engineering Physics, said: "Compared with vacuum evaporation, the slow growth of thin films on parts has long been magnetron sputtering, including high-power pulsed magnetron sputtering.
Technical problem
.
On the other hand, the quality of the coating obtained by vacuum evaporation is much worse than that of the magnetron
.
Therefore, the industrialists have always been faced with a dilemma, that is, whether the product quality of the enterprise or the output is required
.
In the research of pulse magnetron discharge equipment with cathode, we have successfully combined the advantages of the two technologies into one
.
We have learned to sputter at high speed while ensuring quality
.
”
According to scientists, the acquired equipment mode and the diagnosis results show that the high current spraying of molten targets has huge technical potential
.
Experts are now working on industrial samples of devices that are planned to be put into production in the future
.
Andrei Kaqiyev, a scientific researcher in the Plasma Physics Teaching and Research Section of the Moscow Institute of Engineering Physics, said: "The industrial samples of the equipment are the same as the modules used to produce high-quality individual coatings
.
Our potential customers are the production of energy-saving windows and modern energy components.
And companies that manufacture machinery for various profiles"
.
In the world, the magnetron sputtering method accounts for a large part of the market for producing metal and dielectric coatings suitable for electronics, machinery, construction and other fields
.
This method is to coat the processed parts with a material sprayed through a special target by means of plasma
.
At present, magnetron sputtering coating is the most common way to produce thin films in high-tech fields
.
In the late 1980s, the discovery in the high-current pulsed magnetron discharge of the Moscow Institute of Engineering was a major impetus to the research in this field
.
In the first 10 years of the 21st century, Europe and the United States implemented high-power pulsed magnetron sputtering technology (HiPIMS) on this basis
.
The main research motivation and application of pulse magnetron is to obtain characteristic coatings that cannot be made with any other device and method
.