Introduction to the installation knowledge of accessories of high and low temperature circulation all-in-one machine

The performance of each accessory in the high and low temperature circulation machine is different, we must give full play to the role of each accessory in order to make the high and low temperature circulation machine better operation, of which the low temperature pump is one of the main accessories, and its installation also needs to be installed
according to the requirements.

Cryogenic pump in the installation need to pay attention to the installation facilities and requirements, backing pump - cryogenic pump requires a backing pump pre-pumping vacuum chamber, pumping to the starting pressure
of the cryogenic pump.

Adsorption wells - install water-cooled baffles, if the oil vapor returns to the cryogenic pump, its adsorption array can be contaminated, and the adsorption array
needs to be replaced.

The high vacuum valve is installed between the cryogenic pump and the vacuum chamber, which shortens the start-up time and also enables leak
detection of the vacuum chamber at any time without deflation.

The pre-pumping valve needs to be installed at the pre-pumping interface of the cryopump, the valve is opened in the pre-pumping, and the cryopump is closed during operation, and there is also a pre-pumping of the vacuum chamber with the same mechanical pump
.

Then install the cryogenic pump, high vacuum flange connection, the cryogenic pump can be fixed anywhere the vacuum chamber needs with the help of its high vacuum flange, please check whether it is intact before installation, and its surface is free of indentations and debris as the criterion
.

The connection of the suction interface and the safety valve, the cryogenic pump can not be vented during operation, so before starting, it is necessary to use a coarse pumping pump such as a mechanical pump to pre-pump the cryogenic pump
through the suction interface.

It is necessary to ensure that the suction interface of the cryopump is connected to the backing pump of the corresponding size
.

Connect the cryogenic pump and compressor of the high-low temperature circulation machine and remove the cage caps on all self-sealing joints on the cryogenic pump and compressor, as well as the metal hose
.

Note: In the steps below, the self-sealing joint cannot be wiped with detergent
.

There is no dust, oil, particles and debris on the joint before the connection, if necessary, a brush is used to clean the thread, and a soft cloth without cotton wire is used to wipe any swag
on the sealing surface.

Connect the metal hose, connect the hose according to the direction of the air flow, start from the compressor to the cryogenic pump, then from the cryogenic pump to the compressor, use two wrenches to tighten each self-sealing joint to protect the hose from twisting and air leakage, moderately tighten each fitting, and check the compressor's pressure gauge instructions
after connection.