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The main quality of the clean room environment is air cleanliness, that is, the requirements for the concentration of air particles, but because the work carried out in the clean environment is often special, there are often other requirements
for the quality of the clean environment.
First, air cleanliness and cleanliness standards The level of air cleanliness is distinguished
by air cleanliness level.
This level is expressed by the counted dust concentration of the air during the
operating time.
That is, from a low dust concentration to no more than another high dust concentration, this dust concentration range is set as an air cleanliness level
.
Second, the air flow speed in the clean room, on the one hand, is to send clean air to the indoor polluted air dilution, on the other hand is to accelerate the discharge of indoor concentration of polluted air, so the flow rate of clean room air must have a certain speed, in order to prevent the disturbance of other factors, but not too large, the flow rate is too large will make the indoor dust flying, causing new pollution
.
Third, the pressure of the pressure clean space is higher than the pressure
of the non-clean space.
The pressure in a space with a higher cleanliness level is higher than that of adjacent spaces with a low cleanliness level
.
The door between the connecting clean rooms should be opened to the room
with a high cleanliness level.
Fourth, the influence of temperature and humidity temperature on the production process is mainly considered from the
product accuracy and pass rate.
On the other hand, it is also considered
from the perspective of pollution.
Too high humidity will make it difficult to remove
dust from the surface of the object.
However, when the relative humidity is less than 30%, and due to the action of electrostatic electricity, particles are also easy to adsorb on the surface of the object, and in the semiconductor production workshop, static electricity will cause the semiconductor device to break down
.
Fifth, air freshness Air cleanliness refers to the concentration of dust particles contained in the air
.
And it is related
to specific levels.
In fact, such cleanliness is only in the physical sense, a cleanliness in a broad sense
.
From a chemical and physiological point of view, the application guarantees the quantity and quality of oxygen in clean spaces and the amount of negative oxygen ions
.
Sixth, noise and noise make people feel restless and produce disturbing emotions, generally divided into extremely quiet, very quiet, quieter, slightly noisy, more noisy and extremely noisy 7 levels of
trouble.
Where the level of reaction belongs to very noisy and extremely noisy, it is a high annoyance
.
Impact on work efficiency and interference
with integrated communications.
Seventh, illuminance and glare illuminance due to the work content in the clean room mostly have fine requirements, and they are all closed houses
.
Therefore, there are high requirements
for lighting.
The illuminance is an indicator of the amount of illumination, while the indicator of lighting quality uses the concept
of glare.
If the brightness of the illumination is satisfied, but it does not work due to dazzle, the lighting effect is not good
.
Eighth, the electrostatic clean room due to static electricity caused by accidents occur frequently, so how the clean room's anti-static ability has become a non-negligible aspect
of evaluating its quality.